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SJ series

SJ80C-18D/24D, SJ120C-28D/28S

SJ series SJ80C


SJ series SJ120C

Large-sized glass substrate transfer robot

  • Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.

Fastest motion in its class

  • Rotation speed: Maximum 180°/sec
  • Up and down speed: Maximum 1,050 mm/sec

Unique linkage structure applied to up and down axis

  • High-rigidity structure for minimizing flexure and vibration
  • Belt-less structure ensures high reliability and safety

Moving cables are completely enclosed in the arm

  • The enclosed design prevents particle generation and looks good too